Table 1. The result of the design rule for holes and pillars, the unit is millimeter. The measured uncertainty is 0.05 mm.
| Hole Designed Diameter |
Hole Result Diameter |
Pillar Designed Height |
Pillar Result Height |
Pillar Designed Diameter |
Pillar Result Diameter |
| 5 |
4.7 |
50 |
50.1 |
5 |
4.9 |
| 10 |
9.6 |
40 |
40.0 |
10 |
9.9 |
| 15 |
14.9 |
30 |
30.0 |
15 |
14.9 |
| 20 |
19.7 |
20 |
20.2 |
20 |
19.9 |
| 25 |
24.7 |
10 |
10.0 |
25 |
24.9 |